Vertical vacuum rotary magnetron sputtering coating continuous line (U-shaped):
Production rhythm: ≥ 45s
◆ Products: ITO, AR film, vanishing film, hard film, metal film, ultra-high resistance film, low-temperature coating
◆ Coating size: G3.5-8.5
◆ Uniformity of film layer: Control different uniformity based on different target materials: 1.5%~5% (T Max. - Tmin.)/(T Max.+Tmin.)
Equipment features: modular design of cavity
